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Publications - 2013
Journal Papers
- M. Uenuma, B. Zheng, K. Bundo, M. Horita, Y. Ishikawa, H. Watanabe, I. Yamashita, Y. Uraoka,
 "Crystallization of amorphous Ge thin film using Cu nanoparticle synthesized and delivered by ferritin,"
 J. Crystal Growth, 382, 31-35 (2013).
- Y. Minoura, A. Kasuya, T. Hosoi, T. Shimura, and H. Watanabe,
 "Design and contro of Ge-based metal-oxide-semiconductor interfaces for high-mobility field-effect transistors with ultrathin oxynitride gate dielectrics,"
 Appl. Phys. Lett., 103,
 (3) 033502 (2013).
- T. Hosoi, I. Hideshima, R. Tanaka, Y. Minoura, A. Yoshigoe, Y. Teraoka, T. Shimura, and H. Watanabe,
 "Ge diffusion and bonding state change in metal/high-k/Ge gate stacks and its impact on electrical properties,"
 Microelectronic Engineering, 109, 137-141 (2013).
- A. Chanthaphan, T. Hosoi, Y. Nakano, T. Nakamura, T. Shimura, and H. Watanabe,
 "Understanding and controlling bias-temperature instability in SiC metal-oxide-semiconductor devices induced by unusual generation of mobile ions,"
 Appl. Phys. Lett., 102,
 (9) 093510 (2013).
- T. Hashimoto, Y. Fukunishi, B. Zheng, Y. Uraoka, T. Hosoi, T. Shimura, and H. Watanabe,
 "Electrical detection of surface plasmon resonance phenomena by a photoelectronic device integrated with gold nanoparticle plasmon antenna,"
 Appl. Phys. Lett., 102,
 (8) 083702 (2013).
- H. Watanabe, D. Ikeguchi, T. Kirino, S. Mitani, Y. Nakano, T. Nakamura, T. Hosoi, T. Shimura,
 "Novel Approach for Improving Interface Quality of 4H-SiC MOS Devices with UV Irradiation and Subsequent Thermal Annealing,"
 Materials Science Forum,740 - 742, 741-744 (2013).
- T. Hosoi, Y. Uenishi, S. Mitani, Y. Nakano, T. Nakamura, T. Shimura, and H. Watanabe,
 "Dielectric Properties of Thermally Grown SiO2 on 4H-SiC(0001) Substrates,"
 Materials Science Forum,740 - 742, 605-608 (2013).
- M. Fukuta, N. Zettsu, I. Yamashita, Y. Uraoka, and H. Watanabe,
 "The adsorption mechanism of titanium-binding ferritin to amphoteric oxide,"
 Colloid and Surfaces B: Biointerfaces,102, 435-440 (2013).
- A. Mura, I. Hideshima, Z. Liu, T. Hosoi, H. Watanabe, and K. Arima,
 "Water Growth on GeO2/Ge(100) Stack and Its Effect on the Electronic Properties of GeO2,"
 J. Phys. Chem. C, 117,  (1) 165-171 (2013).
- T. Shimura, N. Morimoto, S. Fujino, T. Nagatomi, K. Oshima, J. Harada, K. Omote, N. Osaka, T. Hosoi, and H. Watanabe,
 "Hard x-ray phase contrast imaging using a tabletop Talboot-Lau interferometer with multiline embedded x-ray targets,"
 Optics Letters, 38,  (2) 157-159 (2013).
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International Conferences
- T. Hosoi, I. Hideshima, R. Tanaka, Y. Minoura, A. Yoshigoe, Y. Teraoka, T. Shimura, and H. Watanabe,
 "High-k/Ge Gate Stack with an EOT of 0.56 nm by Controlling Interface Reaction Using Ultrathin AlOx Interlayer,"
 The 44th IEEE Semiconductor Interface Specialists Conference (SISC), 1-2,
 (Arlington, VA, USA, December 5-7, 2013).
- M. Matsue, Y. Yasutake, S. Fukatsu, T. Hosoi, T. Shimura, and H. Watanabe,
 "Enhanced direct bandgap photoluminescence from local Ge-on-insulator structures fabricated by lateral liquid-phase epitaxy –Material and strain engineering toward CMOS compatible group-Ⅳ photonics-,"
 The 44th IEEE Semiconductor Interface Specialists Conference (SISC), 13-2,
 (Arlington, VA, USA, December 5-7, 2013).
- T. Hosoi, Y. Uenishi, A. Chanthaphan, D. Ikeguchi, Y. Nakano, T. Nakamura, T. Shimura, and H. Watanabe,
 "Electrical and physical properties of SiO2 gate dielectrics grown on 4H-SiC," Invited
 The 8th international conference on advanced materials upon the proven concept and continues the tradition of its seven predecessors (THERMEC2013), SessionL5, 947,
 (Las Vegas, NV, USA, December 2-6, 2013).
- T. Hosoi, Y. Suzuki, H. Nishikawa, M. Matsue, T. Shimura, and H. Watanabe,
 "Effective Hole Mobility of GOI MOSFET Fabricated by Lateral Liquid-Phase Epitaxiay,"
 Extended Abstracts of 2013 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (IWDTF2013), pp.139-140,
 (University of Tsukuba (Tokyo Campus), Japan, November 7-9, 2013).
- Y. Minoura, T. Hosoi, J. Matsugaki, S. Kuroki, T. Shimura, and H. Watanabe,
 "Phosphorous Ion Implantation into NiGe Layer for Ohmic Contact Formation on n-Ge,"
 Extended Abstracts of 2013 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (IWDTF2013), pp.101-102,
 (University of Tsukuba (Tokyo Campus), Japan, November 7-9, 2013).
- T. Hosoi, Y. Uenishi, Y. Nakano, T. Nakamura, T. Shimura, and H. Watanabe,
 "Retarded Oxide Growth on 4H-SiC(0001) Substrates Due to Sacrificial Oxidation,"
 International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013), Tu-3B-4,
 (Phoenix Seagaia Resort, Miyazaki, Japan, September 29 - October 4, 2013).
- A. Chanthaphan, T. Hosoi, Y. Nakano, T. Nakamura, T. Shimura, and H. Watanabe,
 "Degradation of SiO2/SiC Interface Properties due to Mobile Ions Intrinsically Generated by High-Temperature Hydrogen Annealing,"
 International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013), Tu-P-39,
 (Phoenix Seagaia Resort, Miyazaki, Japan, September 29 - October 4, 2013).
- A. Chanthaphan, T. Hosoi, Y. Nakano, T. Nakamura, T. Shimura, and H. Watanabe,
 "Suppression of Mobile Ion Diffusion with AlON/SiO2 Stacked Gate Dielectrics for Improving Bias-Temperature Instability in SiC-MOS Devices,"
 International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013), We-P-62,
 (Phoenix Seagaia Resort, Miyazaki, Japan, September 29 - October 4, 2013).
- M. Fukuta, B. Zheng, M. Uenuma, I. Yamashita, Y. Uraoka and H. Watanabe,
 "Insight of Selective Adsorption Mechanism of Titanium-binding Peptide,"
 2013 JSAP-MRS Joint Symposia, 19p-PM5-9,
 (Doshisha University, Kyoto, Japan, September 16-20, 2013).
- T. Hosoi, I. Hideshima, R. Tanaka, Y. Minoura, A. Yoshigoe, Y. Teraoka, T. Shimura, and H. Watanabe,
 "Ge diffusion and bonding state change in metal/high-k/Ge gate stacks and its impact on electrical properties,"
 The 18th Conference of "Insulating Films on Semiconductors"(INFOS2013),
 (The Jagiellonian University, Cracow, Poland, June 28, 2013).
- H. Watanabe,
 "Implementation of High-k Gate Dielectrics in Silicon Carbide Power MOS Devices,"  Invited
 2013 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2013), 1A-2,
 (Korea University, Seoul, Korea, June 26, 2013).
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Domestic Conferences
- Heiji Watanabe,
 "Development of Advanced SiC-MOS Power Devices based on Surface and Interface Analysis," Invited
 Reports on Topical Meeting of the Vacuum Society of Japan, 2013-4, pp. 18-23,
 (Kamitsubo Hall, SPring-8, December 26, 2013).
- Chanthaphan Atthawut、中野 佑紀、中村 孝、細井 卓治、志村 考功、渡部 平司,
 "AlON/SiO2積層ゲート絶縁膜によるSiC MOSデバイスのBTI特性改善,"
 SiC及び関連半導体研究 第22回講演会, A-23, pp. 96-97,
 (埼玉会館, December 9-10, 2013).
 
- 樋口 直樹、福島 悠太、細井 卓治、志村 考功、渡部 平司,
 "HfO2絶縁膜を用いたSiC-MOS界面設計,"
 SiC及び関連半導体研究 第22回講演会, C-29, p. 242,
 (埼玉会館, December 9-10, 2013).
 
- 有馬 健太,河合 佳枝,箕浦 佑也,川合 健太郎,細井 卓治,渡部 平司,森田 瑞穂,Zhi Liu,
 "湿度制御雰囲気下での吸着水/GeO2/Ge構造のXPS観測,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 18p-D2-2,
 (同志社大学, September 16-20, 2013).
- Atthawut Chanthaphan,中野 佑紀,中村 孝,細井 卓治,志村 考功,渡部 平司,
 "Diffusivity of Mobile Ions Inherent to Thermal SiO2/SiC Structures in Deposited SiO2 Gate Dielectrics,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 17a-B3-8,
 (同志社大学, September 16-20, 2013).
- 森本 直樹,藤野 翔,大嶋 建一,原田 仁平,細井 卓治,渡部 平司,志村 考功,
 "吸収格子を用いない小型Talbot-Lau干渉計によるX線位相イメージング,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 18p-A13-1,
 (同志社大学, September 16-20, 2013).
- 藤野 翔,森本 直樹,大嶋 建一,原田 仁平,細井 卓治,渡部 平司,志村 考功,
 "Talbot-Lau干渉計の光学条件の再検討による測定系の小型化,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 18p-A13-2,
 (同志社大学, September 16-20, 2013).
- 松江 将博,安武 裕輔,深津 晋,細井 卓治,志村 考功,渡部 平司,
 "横方向液相成長によって作製したGOI構造のフォトルミネッセンス測定,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 18a-B4-7,
 (同志社大学, September 16-20, 2013).
- 箕浦 佑也,細井 卓治,松垣 仁,黒木 伸一郎,志村 考功,渡部 平司,
 "NiGe/Ge接合へのPイオン注入によるショットキーバリア変調,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 20p-B4-7,
 (同志社大学, September 16-20, 2013).
- 田中 亮平,秀島 伊織,箕浦 佑也,吉越 章隆,寺岡 有殿,細井 卓治,志村 考功,渡部 平司,
 "極薄AlOx層によるHigh-k/Ge界面反応抑制とEOT=0.56 nmの実現,"
 2013年秋季 第74回応用物理学関係連合講演会予稿集, 17p-B5-17,
 (同志社大学, September 16-20, 2013).
- T. Yamamoto, S. Ogawa, T. Hosoi, T. Shimura, and H. Watanabe,
 "Characterization of Interface Structure of Metal Gate / High-k Gate Dielectric,"
 The 77th Symposium on Semiconductors and Integrated Circuits Technology,
 (Tokyo Institute of Technology Tokyo Tech Front, Royal Blue Hall, July 12, 2013).
- 渡部 平司,
 "熱酸化SiC-MOS界面物性の理解と制御," Invited
 日本結晶成長学会ナノ構造・エピタキシャル成長分科会主催SiC結晶成長講演会,
 (大阪大学 銀杏会館, June 20, 2013).
- H. Watanabe, A. Chanthaphan, Y. Nakano, T. Nakamura, T. Hosoi, T. Shimura,
 "Unusual Generation and Elimination of Mobile Ions in Thermally Grown Oxides in SiC-MOS Devices," Invited
 IEICE Technical Committee on Silicon Device and Materials (SDM), Silicon Technology No.161, pp. 84-87,
 (The Kikai Shinko Kaikan, Tokyo, June 18, 2013).
- Hosoi, S. Azumo, Y. Kashiwagi, S. Hosaka, R. Nakamura, Y. Nakano, H. Asahara, T. Nakamura, T. Kimoto, T. Shimura, H. Watanabe,
 "Implementation of High-k Gate Dielectrics in SiC Power MOSFETT," Invited
 IEICE Technical Committee on Silicon Device and Materials (SDM), Silicon Technology No.161, pp. 74-77,
 (The Kikai Shinko Kaikan, Tokyo, June 18, 2013).
- T. Hosoi, I. Hideshima, Y. Minoura, R. Tanaka, A. Yoshigoe, Y. Teraoka, T. Shimura, and H. Watanabe,
 "Germanide Formation in Metal/High-k/Ge Gate Stacks,"
 IEICE Technical Committee on Silicon Device and Materials (SDM), Silicon Technology No.161, pp. 19-23,
 (The Kikai Shinko Kaikan, Tokyo, June 18, 2013).
- 森本 直樹,藤野 翔,大嶋 建一,原田 仁平, 細井 卓治,渡部 平司, 志村 考功,
 "埋め込みX線ターゲットを用いた省電力Talbot-Lau干渉計,"
 2013年度関西地方定期学術講演会,
 (大阪工業大学, June 14, 2013).
- 細井 卓治,上西 悠介,箕谷 周平,中野 佑紀,中村 孝,志村 考功,渡部 平司,
 "犠牲酸化処理が熱酸化SiO2/4H-SiC(0001)構造に及ぼす影響,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-G22-1,
 (神奈川工科大学, March 27-30, 2013).
- 有馬 健太,村 敦史,秀島 伊織,細井 卓治,渡部 平司,Zhi Liu,
 "in-situ XPSによる湿度制御雰囲気下でのGeO2/Ge構造の観察:Ge3dスペクトル形状の湿度依存性,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-G8-4,
 (神奈川工科大学, March 27-30, 2013).
- Atthawut Chanthaphan,箕谷 周平,中野 佑紀,中村 孝,細井 卓治,志村 考功,渡部 平司,
 "Impacts of hydrogen annealing induced mobile ions on thermal SiO2/SiC interface property,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-G22-2,
 (神奈川工科大学, March 27-30, 2013).
- 小川 慎吾,秀島 伊織,箕浦 佑也,木村 耕輔,川崎 直彦,安居 麻美,宮田 洋明,山元 隆志,細井 卓治,志村 考功,渡部 平司,
 "球面収差補正(Cs-corrected)STEM-EELSによる金属電極/GeO2絶縁膜界面反応の解析,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-G2-3,
 (神奈川工科大学, March 27-30, 2013).
- 秀島 伊織,田中 亮平,箕浦 佑也,吉越 章隆,寺岡 有殿,細井 卓治,志村 考功,渡部 平司,
 "MBD法により作製したMetal/High-k/GeO2/Geスタックの熱処理による構造変化,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-G2-10,
 (神奈川工科大学, March 27-30, 2013).
- 森本 直樹,藤野 翔,大嶋 建一,原田 仁平,細井 卓治,渡部 平司,志村 考功,
 "小型X線Talbot-Lau干渉計におけるビジビリティの光源サイズ依存性,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-B1-7,
 (神奈川工科大学, March 27-30, 2013).
- 藤野 翔,森本 直樹,大嶋 建一,原田 仁平,細井 卓治,渡部 平司,志村 考功,
 "マルチライン埋め込みX線タ-ゲットの電力負荷試験と小型Talbot-Lau干渉計による短時間X線位相イメージング,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 28p-B1-6,
 (神奈川工科大学, March 27-30, 2013).
- 西川 弘晃,鈴木 雄一郎,松江 将博,細井 卓治,志村 考功,渡部 平司,
 "横方向液相成長により作製したGOIバックゲートトランジスタのキャリア移動度評価,"
 2013年春季 第60回応用物理学関係連合講演会予稿集, 27a-G20-9,
 (神奈川工科大学, March 27-30, 2013).
- 渡部 平司,
 "先端ゲートスタック開発への放射光光電子分光応用,"依頼講演
 平成24年度文部科学省ナノテクノロジプラットフォーム事業 微細構造解析プラットフォーム 放射光実験設備利用講習会・放射光利用研究セミナー,
 (大阪大学 中之島センター, March 22, 2013).
- 細井 卓治, 東雲 秀司, 柏木 勇作, 保坂 重敏, 中村 亮太, 箕谷 周平, 中野 佑紀, 浅原 浩和, 中村 孝, 木本 恒暢, 志村 考功, 渡部 平司,
 "AlONゲート絶縁膜導入によるSiCパワーMOSFETの高性能化及び信頼性向上,"Invited
 電子情報通信学会 シリコン材料・デバイス研究会(SDM), pp. 19-22,
 (機械振興会館, 東京都港区, January 30, 2013).
- 
K. Arima, A. Mura, I. Hideshima, T. Hosoi, H. Watanabe, and Z. Liu,
 "Effect of Water Adsorption on GeO2/Ge Structures Studied by In-situ XPS under Controlled Relative Humidity,"
 Extended Abstracts of the 18th Workshop on Gate Stack Technology and Physics, pp. 111-114,
 (New Wilcity Yugawara, Atami, January 25-26, 2013).
- 
S. Ogawa, I. Hideshima, Y. Minoura, T. Yamamoto, A. Yasui, H. Miyata, K. Kimura, T. Hosoi, T. Shimura, and H. Watanabe,
 "Interface Engineering between Metal Electrode and GeO2 Dielectric for Future Ge-Based Metal-Oxide-Semiconductor Technologies,"
 Extended Abstracts of the 18th Workshop on Gate Stack Technology and Physics, pp. 225-228,
 (New Wilcity Yugawara, Atami, January 25-26, 2013).
- 
M. Matsue, Y. Suzuki, H. Nishikawa, T. Hosoi, T. Shimura, and H. Watanabe,
 "Evaluation of the Carrier Mobility of Ge-on-Insulator MOSFET Formed by Lateral Liquid-Phase Epitaxy,"
 Extended Abstracts of the 18th Workshop on Gate Stack Technology and Physics, pp. 221-224,
 (New Wilcity Yugawara, Atami, January 25-26, 2013).
- 
A. Chanthaphan, S. Mitani, Y. Nakano, T. Nakamura, T. Hosoi, T. Shimura, and H. Watanabe,
 "Unusual Generation and Elimination of Mobile Ions in Thermally Grown SiO2 on 4H-SiC(0001),"
 Extended Abstracts of the 18th Workshop on Gate Stack Technology and Physics, pp. 71-74,
 (New Wilcity Yugawara, Atami, January 25-26, 2013).
- 
Y. Minoura, A. Kasuya, T. Hosoi, T. Shimura, and H. Watanabe,
 "Gate Stack Technology for High Performance Ge MOSFETs with Ultrathin GeON Gate Dielectrics,"
 Extended Abstracts of the 18th Workshop on Gate Stack Technology and Physics, pp. 31-34,
 (New Wilcity Yugawara, Atami, January 25-26, 2013).
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Reviews
- 細井 卓治,
 "SiC MOSFET 向け AlON 高誘電率ゲート絶縁膜技術を開発 -信頼性の課題を克服-,"
 電子情報通信学会誌, Vol. 96, No. 5, pp.371-372,
 (May, 2013).
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