X線トポグラフィ関連論文リスト

会員によるものだけでなく、X線トポグラフィ関連の論文のリスト、会議録、アブストラクト集等を掲載しています。 会員の方は適宜適当なものがあれば掲載をお願い致します。

2009

2008

「X線トポグラフィ研究会の現状報告」、飯田 敏、志村考功、梶原健太郎、SPring-8 Information, 13, 50-55 (2008).

"Application of Synchrotron X-ray Diffraction Methods to Gate Stacks of Advanced MOS Devices", T. Shimura, T. Inoue, Y. Okamoto, T. Hosoi, A. Ogura, O. Sakata, S. Kimura, H. Edo, S. Iida and H. Watanabe, ECS Transactions 13, 75-82 (2008).

"Characterization of Strained Si Wafers by X-ray Diffraction Techniques", T. Shimura, K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, S. Kimura, H. Edo, S. Iida and M. Umeno, J Mater Sci: Mater Electron. 19 (2008) 189-193.

"Observation of Crystalline Imperfections in Supercritical Thickness Strained Silicon on Insulator Wafers by Synchrotron X-ray Topography", T. Shimura, T. Inoue, Y. Okamoto, T. Hosoi, H. Edo, S. Iida, A. Ogura and H. Watanabe, ECS Transactions 16, 539-543 (2008).

2007

2006

"White X-ray Topography of Lattice Undulation in Bonded Silicon-on-Insulator Wafers Kazunori Fukuda", T. Yoshida, T. Shimura, K. Yasutake, M. Umeno, and S. Iida, Jpn. J. Appl. Phys. 45, 6795-6799 (2006).


Front page   New List of pages Search Recent changes   Help   RSS of recent changes