Homepage of X-ray Topography Group

List of papers related with X-ray topography †

2009 †

2008 †

「X線トポグラフィ研究会の現状報告」、飯田 敏、志村考功、梶原健太郎、SPring-8利用者情報, 13, 50-55 (2008).

"Application of Synchrotron X-ray Diffraction Methods to Gate Stacks of Advanced MOS Devices", T. Shimura, T. Inoue, Y. Okamoto, T. Hosoi, A. Ogura, O. Sakata, S. Kimura, H. Edo, S. Iida and H. Watanabe, ECS Transactions 13, 75-82 (2008).

"Characterization of Strained Si Wafers by X-ray Diffraction Techniques", T. Shimura, K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, S. Kimura, H. Edo, S. Iida and M. Umeno, J. Mater. Sci.: Mater. Electron. 19 189-193 (2008).

"Observation of Crystalline Imperfections in Supercritical Thickness Strained Silicon on Insulator Wafers by Synchrotron X-ray Topography", T. Shimura, T. Inoue, Y. Okamoto, T. Hosoi, H. Edo, S. Iida, A. Ogura and H. Watanabe, ECS Transactions 16, 539-543 (2008).

2007 †

2006 †

"White X-ray Topography of Lattice Undulation in Bonded Silicon-on-Insulator Wafers" K. Fukuda, T. Yoshida, T. Shimura, K. Yasutake, M. Umeno, and S. Iida, Jpn. J. Appl. Phys. 45, 6795-6799 (2006).